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MA/MS in Microsystems Engineering

Albert-Ludwigs-Universität Freiburg

Freiburg im Breisgau, Germany

Official program page (opens in a new tab)

MA/MS in Microsystems Engineering is a master's degree in Robotics & Automation programme offered by Albert-Ludwigs-Universität Freiburg in Freiburg im Breisgau, Germany. The programme runs for 4 semesters, delivered on campus. It carries 120.0 credits (ECTS). Teaching is in de, en.

At a glance

Degree: Master's Degree
Field: Robotics & Automation
Duration: 4 semesters
Delivery: On Campus
Credits: 120.0 (ECTS)
Language: de, en

We have no tuition fees on record for this programme yet — see the official programme page. — it helps other students.

Last checked November 2026 · Source: uni-freiburg.de ·

Program details

Overview

This English-taught master's programme covers microsystems, also known as MEMS or micromachines, an engineering discipline that draws on electrical engineering, mechanical engineering, materials science and the life sciences. It is run by one of the field's largest academic research institutes, which combines interdisciplinary high-technology research with a strong focus on practical application. The first year covers five compulsory courses spanning microelectronics, micromechanics, microsystems technologies and processes, microsystem design, and signal processing, complemented by a selection of elective courses. Students then specialise in one of four areas: circuits and systems, biomedical engineering, materials and fabrication, or photonics. Graduates leave with the interdisciplinary depth needed for research and engineering careers in microsystems and sensor technologies worldwide.

Requirements

Admission Requirements: Admission requires either German C1 and English B2, or English C1 only. Entry conditions follow the admission statutes; places are subject to special access requirements. Application is online only, with separate deadlines for non-EU and EU applicants.
Type Test Min / Max Status Notes
Language Proficiency — — Required German C1 (plus English B2) for the German-taught profile, or English C1 for the English-taught profile.

Application Details

Start Date: Wintersemester (October)
Application Deadline: non-EU 01.03. - 31.05., EU 01.03. - 15.07.

About Albert-Ludwigs-Universität Freiburg

“Die Wahrheit wird euch frei machen”

Type: University
Control: Public
Campus setting: Urban
Founded: 1457
Students: 24,500
Programs: 191
Location: Freiburg im Breisgau, Germany
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Frequently asked questions

What degree does MA/MS in Microsystems Engineering award?

Albert-Ludwigs-Universität Freiburg awards a Master's Degree in the field of Robotics & Automation on completion of this programme.

How long does MA/MS in Microsystems Engineering take?

The programme runs for 4 semesters.

Can MA/MS in Microsystems Engineering be studied online?

No — the programme is taught on campus at Albert-Ludwigs-Universität Freiburg.

What language is MA/MS in Microsystems Engineering taught in?

The programme is taught in de, en.

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